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半導(dǎo)體制造業(yè)中真空泵的發(fā)展趨勢
真空泵作為半導(dǎo)體制造行業(yè)的一種主要的生產(chǎn)設(shè)備，愈來愈要求安全可靠。英國薩西克斯郡Edwards公司則推出了“福姆勃林”(Fomblin)惰性潤滑流體，它不管用在什么場合，同氧接觸都是沒有問題的。
常用真空系統(tǒng)的組成與安裝
從日常生活用電燈泡的制造，到宇航模擬艙的實驗，所有真空工程中的應(yīng)用設(shè)備。都是通過真空系統(tǒng)實現(xiàn)的。不同的真空應(yīng)用設(shè)備，所用的真空系統(tǒng)是不完全一樣的，但其基本組成是類似的。
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